Non-Reciprocal MEMS Periodic Structure

In recent years, active periodic structures with in-time modulated parameters have drawn ever-increasing attention due to their peculiar (and sometimes exotic) wave propagation properties. Although many experimental works shown the efficacy of time-modulation strategies, benchmarks proposed until now been mostly proof-of-concept demonstrators, little feasibility solution for practical purposes. this work, we propose a micro electro-mechanical system (MEMS) structure electromechanical stiffness featuring non-reciprocal band-gaps that are frequency bands where elastic waves allowed travel only in one direction. To aim, derive simplified analytical lumped-parameter model, which is then verified through numerical simulations both and high-fidelity multiphysics finite element model including electrostatic effects. We envision system, can easily be manufactured standard MEMS production processes, may used as directional filter devices such insulators circulators.